×
INTELLIGENT WORK FORUMS
FOR ENGINEERING PROFESSIONALS

Log In

Come Join Us!

Are you an
Engineering professional?
Join Eng-Tips Forums!
  • Talk With Other Members
  • Be Notified Of Responses
    To Your Posts
  • Keyword Search
  • One-Click Access To Your
    Favorite Forums
  • Automated Signatures
    On Your Posts
  • Best Of All, It's Free!
  • Students Click Here

*Eng-Tips's functionality depends on members receiving e-mail. By joining you are opting in to receive e-mail.

Posting Guidelines

Promoting, selling, recruiting, coursework and thesis posting is forbidden.

Students Click Here

Jobs

plasma heat load relationship

plasma heat load relationship

plasma heat load relationship

(OP)
i have an aluminum plate facing a 3kw plasma source.  how can i translate that 3kw plasma source into some sort of heat flux/load so that i can do a thermal model of the plate?

RE: plasma heat load relationship

For starters are you discussing only  radiant heating effects?

Keith Cress
Flamin Systems, Inc.- http://www.flaminsystems.com

RE: plasma heat load relationship

(OP)
radiation and convection i would assume.

RE: plasma heat load relationship

What pressure is the plasma formed at?  Low pressure conditions have little in the way of convection.

TTFN



RE: plasma heat load relationship

(OP)
the assembly is in vacuum.  there is an inert gas flowing through the generator and onto the plate.  when its a 3kw generator, would it also be a 3kw heat load onto the plate?

RE: plasma heat load relationship

Vacuum means essentially no convection.  You need a fluid, or gas, heat transport for that.

In any case, I would then suggest that you look at competitor's systems to determine whether the heat load is a issue or not.  

Small plasma reactors that hold 1 lot of wafers are completely devoid of any heat exchanging in the chambers.

TTFN



RE: plasma heat load relationship

(OP)
there is definitely a heat load.  and yes, there is inert gas flowing through the rf generator and into the chamber.  therefore the plate in the chamber is exposed to the plasma and thus being heated.  

Red Flag This Post

Please let us know here why this post is inappropriate. Reasons such as off-topic, duplicates, flames, illegal, vulgar, or students posting their homework.

Red Flag Submitted

Thank you for helping keep Eng-Tips Forums free from inappropriate posts.
The Eng-Tips staff will check this out and take appropriate action.

Reply To This Thread

Posting in the Eng-Tips forums is a member-only feature.

Click Here to join Eng-Tips and talk with other members!


Resources