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Vacuum leakage?

Vacuum leakage?

Vacuum leakage?

(OP)
Hi. Guys:
I have an old PECVD system to set up. Huge leakage in load chamber. Can not pump down under 100 Torr. Rough pump is verified  good. I tried alchol and N2. But I could not find obvious leakage. Anyway you can suggest? Thank you.

RE: Vacuum leakage?


I don't know if smoke could contaminate your system, but sometimes I test with incense to find out vacuum leakage.

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